FUKUZAWA LAB. Nagoya University

Real-time observation of nanometer-thick liquid film
Outline
ー
This system can observe nano-thick liquid or solid films in real-time using the principle of ellipsometry. Since ellipsometry using the polarization analysis method calculates the film thickness at a single point of the sample, it cannot observe its thickness distribution. We developed our originally developed optical system for ellipsometry. We succeeded in observing the film thickness distribution in real-time with the measurement resolution of 0.1 nm and the lateral resolution of 0.1 μm.
ー
Applications
・Real-time observation of liquid lubrication film with nanometer thickness in a hard disk drive
・Visualization of the deposition process of photoresist and silicon oxide insulating film in semiconductor devices
・Visualization of nano-thickness functional thin films such as self-assembled films, LB films, DNA microfluidic devices, and antigen-antibody reaction films
ー
Keywords
